LOCALIZED LASER ETCHING OF COMPOUND SEMICONDUCTORS IN AQUEOUS-SOLUTION

被引：89

作者：

OSGOOD, RM ^{[1
]}

SANCHEZRUBIO, A ^{[1
]}

EHRLICH, DJ ^{[1
]}

DANEU, V ^{[1
]}

机构：

[1] MIT, LINCOLN LAB, LEXINGTON, MA 02173 USA

来源：

APPLIED PHYSICS LETTERS | 1982年 / 40卷 / 05期

关键词：

D O I：

10.1063/1.93113

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：391 / 393

页数：3

共 13 条

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