CHEMICAL VAPOR-DEPOSITION OF METALS FOR INTEGRATED-CIRCUIT APPLICATIONS

被引：56
作者：
GREEN, ML
LEVY, RA
机构：
来源：
JOURNAL OF METALS | 1985年 / 37卷 / 06期
关键词：
D O I：
10.1007/BF03257716
中图分类号：
TF [冶金工业];
学科分类号：
0806 ;
摘要：
引用
收藏
页码：63 / 71
页数：9
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