CHEMICAL VAPOR-DEPOSITION OF METALS FOR INTEGRATED-CIRCUIT APPLICATIONS

被引：56

作者：

GREEN, ML

LEVY, RA

机构：

来源：

JOURNAL OF METALS | 1985年 / 37卷 / 06期

关键词：

D O I：

10.1007/BF03257716

中图分类号：

TF [冶金工业];

学科分类号：

0806 ;

摘要：

引用

收藏

页码：63 / 71

页数：9

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