AN INTERCHANGEABLE SILICON PRESSURE SENSOR WITH ON-CHIP COMPENSATION CIRCUITRY

被引：9
|
作者：
KOPYSTYNSKI, P
OBERMEIER, E
机构：
[1] Fraunhofer-Inst fuer, Festkoerpertechnologie, Germany
来源：
SENSORS AND ACTUATORS | 1989年 / 18卷 / 3-4期
关键词：
8;
D O I：
10.1016/0250-6874(89)87031-3
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：239 / 245
页数：7
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