SIMPLE CRITERION ON COLLOID FORMATION IN SIO2 GLASSES BY ION-IMPLANTATION

被引:67
作者
HOSONO, H
机构
[1] Research Laboratory of Engineering Materials, Tokyo Institute of Technology, Midori-ku, Yokohama, 227
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 9A期
关键词
ION IMPLANTATION; SIO2; GLASS; COLLOID FORMATION; NANOCOMPOSITE;
D O I
10.1143/JJAP.32.3892
中图分类号
O59 [应用物理学];
学科分类号
摘要
A simple criterion as a first approximation to predict the formation of elementary colloids of implants in SiO2 glasses by ion implantation has been proposed. The criterion predicts that colloid formation occurs when free energy of formation of oxides of implants is greater than that of SiO2 at approximately 3000 K, which corresponds to the fictive temperature of implanted layers. The prediction is compared with observations reported so far.
引用
收藏
页码:3892 / 3894
页数:3
相关论文
共 29 条
[1]   NEAR-SURFACE NUCLEATION AND CRYSTALLIZATION OF AN ION-IMPLANTED LITHIA-ALUMINA-SILICA GLASS [J].
ARNOLD, GW .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (10) :4466-4473
[2]   CHARACTERIZATION OF THE NEAR-SURFACE REGION OF GLASS IMPLANTED WITH LIGHT-ELEMENTS [J].
ARNOLD, GW ;
BROW, RK ;
MYERS, DR .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 120 (1-3) :234-240
[3]  
ARNOLD GW, 1977, J APPL PHYS, V48, P488
[4]   PRECIPITATION OF GROUP-V ELEMENTS AND GE IN SIO2 AND THEIR DRIFT IN A TEMPERATURE-GRADIENT [J].
CELLER, GK ;
TRIMBLE, LE ;
SHENG, TT ;
KOSINSKI, SG ;
WEST, KW .
APPLIED PHYSICS LETTERS, 1988, 53 (13) :1178-1180
[5]  
FUKUMI K, 1991, JPN J APPL PHYS, V30, P744
[6]   RAMAN STUDIES OF VITREOUS SIO2 VERSUS FICTIVE TEMPERATURE [J].
GEISSBERGER, AE ;
GALEENER, FL .
PHYSICAL REVIEW B, 1983, 28 (06) :3266-3271
[7]   LARGE 3RD-ORDER OPTICAL NONLINEARITY OF NANOMETER-SIZED AMORPHOUS-SEMICONDUCTOR - PHOSPHORUS COLLOIDS FORMED IN SIO2 GLASS BY ION-IMPLANTATION [J].
HOSONO, H ;
ABE, Y ;
LEE, YL ;
TOKIZAKI, T ;
NAKAMURA, A .
APPLIED PHYSICS LETTERS, 1992, 61 (23) :2747-2749
[8]   CROSS-SECTIONAL TEM OBSERVATION OF COPPER-IMPLANTED SIO2 GLASS [J].
HOSONO, H ;
FUKUSHIMA, H ;
ABE, Y ;
WEEKS, RA ;
ZUHR, RA .
JOURNAL OF NON-CRYSTALLINE SOLIDS, 1992, 143 (2-3) :157-161
[9]   EFFECTS OF COIMPLANTATION OF SILICON AND NITROGEN ON STRUCTURAL DEFECTS AND SI-N BOND FORMATION IN SILICA GLASS [J].
HOSONO, H ;
ABE, Y ;
OYOSHI, K ;
TANAKA, S .
PHYSICAL REVIEW B, 1991, 43 (14) :11966-11970
[10]   COALESCENCE OF NANOSIZED COPPER COLLOID PARTICLES FORMED IN CU-IMPLANTED SIO2 GLASS BY IMPLANTATION OF FLUORINE IONS - FORMATION OF VIOLET COPPER COLLOIDS [J].
HOSONO, H ;
ABE, Y ;
MATSUNAMI, N .
APPLIED PHYSICS LETTERS, 1992, 60 (21) :2613-2615