TEMPERATURE AND THICKNESS DEPENDENCE OF THE RESISTIVITY OF THIN POLYCRYSTALLINE ALUMINUM, COBALT, NICKEL, PALLADIUM, SILVER AND GOLD-FILMS

被引：137
作者：
DEVRIES, JWC
机构：
[1] Philips Research Lab, Netherlands
来源：
THIN SOLID FILMS | 1988年 / 167卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(88)90478-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
17
引用
收藏
页码：25 / 32
页数：8
相关论文
共 18 条
[1]   PROPERTIES OF PD/AU THIN-FILM LAYERED STRUCTURES [J].
CARCIA, PF ;
SUNA, A .
JOURNAL OF APPLIED PHYSICS, 1983, 54 (04) :2000-2005
[2]  
CHOPRA KL, 1985, THIN FILM PHENOMENA, P369
[3]   ELECTRICAL-RESISTIVITY OF ALUMINUM AND MANGANESE [J].
DESAI, PD ;
JAMES, HM ;
HO, CY .
JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1984, 13 (04) :1131-1172
[4]   TEMPERATURE-DEPENDENT RESISTIVITY MEASUREMENTS ON POLYCRYSTALLINE SIO2-COVERED THIN NICKEL FILMS [J].
DEVRIES, JWC .
THIN SOLID FILMS, 1987, 150 (2-3) :209-215
[5]   TEMPERATURE-DEPENDENT RESISTIVITY MEASUREMENTS ON POLYCRYSTALLINE SIO2-COVERED THIN GOLD-FILMS [J].
DEVRIES, JWC .
THIN SOLID FILMS, 1987, 150 (2-3) :201-208
[6]   RESISTIVITY OF THIN AU FILMS AS A FUNCTION OF GRAIN DIAMETER AND TEMPERATURE [J].
DEVRIES, JWC .
JOURNAL OF PHYSICS F-METAL PHYSICS, 1987, 17 (09) :1945-1952
[7]   SURFACE SCATTERING IN THIN EVAPORATED GOLD DOUBLE-LAYERS STUDIED BY INSITU RESISTIVITY MEASUREMENTS [J].
DEVRIES, JWC .
JOURNAL OF PHYSICS F-METAL PHYSICS, 1987, 17 (12) :2403-2409
[8]   The conductivity of thin metallic films according to the electron theory of metals [J].
Fuchs, K .
PROCEEDINGS OF THE CAMBRIDGE PHILOSOPHICAL SOCIETY, 1938, 34 :100-108
[9]   ELECTRICAL-RESISTIVITY OF COPPER, GOLD, PALLADIUM, AND SILVER [J].
MATULA, RA .
JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1979, 8 (04) :1147-1298
[10]   ELECTRICAL RESISTIVITY MODEL FOR POLYCRYSTALLINE FILMS - CASE OF SPECULAR REFLECTION AT EXTERNAL SURFACES [J].
MAYADAS, AF ;
SHATZKES, M ;
JANAK, JF .
APPLIED PHYSICS LETTERS, 1969, 14 (11) :345-&
12