PRECURSOR PROPERTIES OF CALCIUM BETA-DIKETONATE IN VAPOR-PHASE ATOMIC LAYER EPITAXY

被引：26

作者：

AARIK, J

AIDLA, A

JAEK, A

LESKELA, M

NIINISTO, L

机构：

[1] UNIV HELSINKI,INORGAN CHEM LAB,SF-00014 HELSINKI,FINLAND

[2] HELSINKI UNIV TECHNOL,INORGAN & ANALYT CHEM LAB,SF-02150 ESPOO,FINLAND

来源：

APPLIED SURFACE SCIENCE | 1994年 / 75卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(94)90132-5

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Real time mass monitoring was employed to investigate the atomic layer epitaxy process using Ca(thd)(2)/H2O (thd = 2,2,6,6-tetramethyl-3,5-heptanedione) and Ca(thd)(2)/H2S as precursors. The decomposition of Ca(thd)(2) on the substrate surface had a significant effect on the growth process while the fractionation of the precursor in the evaporation cell did not affect the growth rate at source temperatures below 280 degrees C. The activation energy of the Ca(thd)(2) decomposition process was determined from the deposit mass measurements, being 30 kJ/mol.

引用

页码：33 / 38

页数：6

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