VARIBAND GAAS(1-X)PX - A MATERIAL FOR PRESSURE SENSORS

被引：2

作者：

GRIDCHIN, VA

PUCKLYAKOV, YA

SHURMAN, LB

机构：

[1] Department of Applied and Theoretical Physics, Novosibirsk Institute of Electrical Engineering, Novosibirsk

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1992年 / 30卷 / 1-2期

关键词：

D O I：

10.1016/0924-4247(92)80208-K

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Variband GaAs(1-x)Px has been used for creating a compact hydrostatic pressure sensor. The optimal phosphorus distribution profile in gallium arsenide-phosphide along the thickness of the resistor enables the temperature sensitivity of the output signal to be minimized in the temperature range 250-550 K.

引用

页码：139 / 142

页数：4