NANOWRITER - A NEW HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY SYSTEM FOR NANOMETER-SCALE FABRICATION

被引：23

作者：

CHEN, ZW

JONES, GAC

AHMED, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584119

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2009 / 2013

页数：5

共 9 条

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[7] HIGH-RESOLUTION PATTERNING SYSTEM WITH A SINGLE BORE OBJECTIVE LENS [J].

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