THIN-FILM WAVE-GUIDES OF ZIRCONIUM OXYFLUORIDE WITH VARIABLE REFRACTIVE-INDEX PRODUCED BY ION-BEAM-ASSISTED DEPOSITION

被引：3
|
作者：
GIBSON, UJ
CORNETT, KD
机构：
[1] Thayer School of Engineering, Dartmouth College, Hanover, NH
来源：
OPTICS LETTERS | 1995年 / 20卷 / 21期
关键词：
D O I：
10.1364/OL.20.002201
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We describe the formation of ZrOxFy optical waveguides by oxygen ion-beam-assisted deposition of ZrF4 films. Waveguide losses less than 1 dB/cm for the TE(0) mode at 514 nm resulted from bombardment with 600-eV O-2(+) ions, and the waveguide index was a function of bombarding current at this energy, with a maximum change of Delta n = 0.28. Local bombardment of a waveguide resulted in generation of an integrated planar lens compatible with holographic fabrication. The process is also suitable for the formation of graded-index waveguides. (C) 1995 Optical Society of America
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页码：2201 / 2203
页数：3
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