THIN-FILM WAVE-GUIDES OF ZIRCONIUM OXYFLUORIDE WITH VARIABLE REFRACTIVE-INDEX PRODUCED BY ION-BEAM-ASSISTED DEPOSITION

We describe the formation of ZrOxFy optical waveguides by oxygen ion-beam-assisted deposition of ZrF4 films. Waveguide losses less than 1 dB/cm for the TE(0) mode at 514 nm resulted from bombardment with 600-eV O-2(+) ions, and the waveguide index was a function of bombarding current at this energy, with a maximum change of Delta n = 0.28. Local bombardment of a waveguide resulted in generation of an integrated planar lens compatible with holographic fabrication. The process is also suitable for the formation of graded-index waveguides. (C) 1995 Optical Society of America