MASS-FLOW LIMITATIONS IN REACTIVE SPUTTERING

被引：23

作者：

BLOM, HO

BERG, S

LARSSON, T

机构：

来源：

THIN SOLID FILMS | 1985年 / 130卷 / 3-4期

关键词：

D O I：

10.1016/0040-6090(85)90361-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：307 / 313

页数：7

共 8 条

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