BIREFRINGENT WAVEGUIDES PREPARED BY REACTIVE SPUTTERING OF NIOBIUM IN O2-N2 MIXTURES

被引：13

作者：

INGREY, SJ ^{[1
]}

WESTWOOD, WD ^{[1
]}

机构：

[1] BELL NO RES,BOX 3511,STN C,OTTAWA K1Y 4H7,ONTARIO,CANADA

来源：

APPLIED OPTICS | 1976年 / 15卷 / 03期

关键词：

D O I：

10.1364/AO.15.000607

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：607 / 609

页数：3

共 10 条

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[4]

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[5] VARIABLE REFRACTIVE-INDEX AND BIREFRINGENT WAVEGUIDES BY SPUTTERING TANTALUM IN O2-N2 MIXTURES [J].

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WEI, J .

APPLIED OPTICS, 1975, 14 (09) :2194-2198

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[7] INFLUENCE OF APPARATUS GEOMETRY AND DEPOSITION CONDITIONS ON STRUCTURE AND TOPOGRAPHY OF THICK SPUTTERED COATINGS [J].

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[9] CATHODE DARK-SPACE MEASUREMENTS AND DEPOSITION RATES OF TANTALUM IN A SPUTTERING SYSTEM [J].

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[10]

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