EFFECT OF MIXING IONS ON THE FORMATION PROCESS OF BETA-SIC FABRICATED BY ION-BEAM MIXING

被引：4
|
作者：
KIMURA, T [1 ]
YAMAGUCHI, H [1 ]
LUO, JK [1 ]
YUGO, S [1 ]
ADACHI, Y [1 ]
KAZUMATA, Y [1 ]
机构：
[1] JAPAN ATOM ENERGY RES INST,TOKAI,IBARAKI 31911,JAPAN
来源：
THIN SOLID FILMS | 1988年 / 157卷 / 01期
关键词：
D O I：
10.1016/0040-6090(88)90352-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：117 / 127
页数：11
相关论文
共 50 条
  • [41] ION-BEAM MIXING - BASIC EXPERIMENTS
    PAINE, BM
    AVERBACK, RS
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR): : 666 - 675
  • [42] LOW-TEMPERATURE FORMATION OF beta -TYPE SILICON CARBIDE BY ION-BEAM MIXING.
    Kimura, Tadamasa
    Tatebe, Yuki
    Kawamura, Akira
    Yugo, Shigemi
    Adachi, Yoshio
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, 1985, 24 (12): : 1712 - 1715
  • [43] METASTABLE PHASE FORMATION BY ION-BEAM MIXING IN ALMN AND ALFE SYSTEMS
    PLENET, JC
    PEREZ, A
    RIVORY, J
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1992, 48 (263): : 315 - 316
  • [44] TITANIUM SILICIDE FORMATION BY ION-BEAM MIXING AND RAPID THERMAL ANNEALING
    MATTIUSSI, GA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (06): : 1352 - 1357
  • [45] FORMATION OF THE ICOSAHEDRAL AL-FE PHASE BY ION-BEAM MIXING
    HOHMUTH, K
    HEERA, V
    RAUSCHENBACH, B
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 136 - 140
  • [46] Formation of a Nickel-Aluminum Intermetallic during Ion-Beam Mixing
    Vorob'ev, V. L.
    Klimova, I. N.
    Kolotov, A. A.
    Bykov, P. V.
    Bayankin, V. Ya.
    JOURNAL OF SURFACE INVESTIGATION, 2019, 13 (06): : 1225 - 1229
  • [47] TITANIUM NITRIDE FILM FORMATION BY THE DYNAMIC ION-BEAM MIXING METHOD
    NAKAGAWA, Y
    OHTANI, S
    NAKATA, T
    MIKODA, M
    TAKAGI, T
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1402 - 1405
  • [48] FORMATION OF METASTABLE PHASES BY ION-BEAM MIXING IN THE CU/CR SYSTEM
    KOSSOWSKY, R
    GREGGI, J
    JENSEN, RR
    JOURNAL OF METALS, 1983, 35 (12): : 49 - 49
  • [49] AN ION-BEAM MIXING MODEL FOR COMPOUND FORMATION - THE CASE OF PD/SI
    DESIMONI, J
    TRAVERSE, A
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 (80-81): : 91 - 93
  • [50] FORMATION OF RHODIUM SILICIDE BY RAPID THERMAL ANNEALING AND BY ION-BEAM MIXING
    BURTE, EP
    NEUNER, G
    APPLIED SURFACE SCIENCE, 1991, 53 : 283 - 290
12345