COMPARATIVE SOL-GEL PROCESSING OF PZT THIN-FILMS

被引：24
|
作者：
SAYER, M
YI, G
SEDLAR, M
机构：
[1] Department of Physics, Queen's University, Kingston, Ontario
来源：
INTEGRATED FERROELECTRICS | 1995年 / 7卷 / 1-4期
基金：
加拿大自然科学与工程研究理事会;
关键词：
D O I：
10.1080/10584589508220237
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Four major sol gel or metallorganic decomposition routes for the processing of lead zirconate have been established. The requirements and criteria for successful processing are reviewed, and the concept of a characteristic volume over which the gel is stoichiometric is introduced. The need for solution species of comparable size is outlined and means for ensuring this condition are discussed.
引用
收藏
页码：247 / 258
页数：12
相关论文
共 50 条
  • [1] PREPARATION OF FERROELECTRIC PZT THIN-FILMS BY SOL-GEL PROCESSING
    OGIMOTO, Y
    MASUDA, Y
    OHTANI, N
    KOBA, M
    SHARP TECHNICAL JOURNAL, 1994, (59): : 11 - 15
  • [2] PROCESSING AND PARAMETERS OF SOL-GEL PZT THIN-FILMS FOR GAAS MEMORY APPLICATIONS
    DEY, SK
    ZULEEG, R
    FERROELECTRICS, 1990, 112 : 309 - 319
  • [3] SOL-GEL PROCESSING OF PLZT THIN-FILMS
    SEDLAR, M
    ZOU, L
    SAYER, M
    INTEGRATED FERROELECTRICS, 1995, 6 (1-4) : 129 - 140
  • [4] PREPARATION OF PZT THIN-FILMS BY SOL-GEL PROCESS AND PROPERTIES
    SAKAI, H
    TUCHIYA, T
    NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1991, 99 (07): : 630 - 634
  • [5] Sol-Gel Processing of Bismuth Germanate Thin-Films
    Secu, Mihail
    Secu, Corina Elisabeta
    Tite, Teddy
    Polosan, Silviu
    COATINGS, 2020, 10 (03)
  • [6] Preparation of PZT ferroelectric thin films by sol-gel processing and their properties
    Liu, MD
    Lu, CR
    Wang, PY
    Rao, YH
    Zeng, YK
    Li, CR
    SENSORS AND ACTUATORS A-PHYSICAL, 1995, 49 (03) : 191 - 194
  • [7] SOL-GEL DERIVED OXIDE THIN-FILMS - PROCESSING AND APPLICATIONS
    ASHLEY, CS
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 209 : 3 - TECH
  • [8] SOL-GEL PROCESSING OF PZT THIN-FILMS - A REVIEW OF THE STATE-OF-THE-ART AND PROCESS OPTIMIZATION STRATEGIES
    SCHWARTZ, RW
    BOYLE, TJ
    LOCKWOOD, SJ
    SINCLAIR, MB
    DIMOS, D
    BUCHHEIT, CD
    INTEGRATED FERROELECTRICS, 1995, 7 (1-4) : 259 - 277
  • [9] MICROSTRUCTURAL AND ELECTRICAL-PROPERTIES OF PZT THIN-FILMS BY SOL-GEL PROCESS
    FAURE, SP
    HECTOR, J
    GAUCHER, P
    GANNE, JP
    JOURNAL DE PHYSIQUE III, 1994, 4 (10): : 1929 - 1937
  • [10] CHEMISTRY OF SOL-GEL THIN-FILMS
    BRINKER, CJ
    ASSINK, RA
    WARD, KJ
    FRYE, GC
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1989, 197 : 10 - PHYS
12345