ANALYSIS OF CARBON CONTENT AND DISTRIBUTION IN A-SI1-XCX-H FILMS BY RESONANT SCATTERING

被引：8

作者：

SIE, SH

MCKENZIE, DR

SMITH, GB

RYAN, CG

机构：

[1] UNIV SYDNEY,SCH PHYS,SYDNEY,NSW 2006,AUSTRALIA

[2] NEW S WALES INST TECHNOL,DEPT PHYS,BROADWAY,NSW 2007,AUSTRALIA

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 15卷 / 1-6期

关键词：

D O I：

10.1016/0168-583X(86)90382-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：632 / 635

页数：4

共 6 条

[1]

MCKENZIE DR, 1984, J APPL PHYS, V56, P2356, DOI 10.1063/1.334274

[2] THE C-12(ALPHA,ALPHA)C-12 NUCLEAR-RESONANCE AT 4.26 MEV AND ITS APPLICATION IN RBS ANALYSIS OF CARBON CONTENT IN THIN-FILMS [J].

OSTLING, M ;

PETERSSON, CS ;

POSSNERT, G .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :439-444

[3] SURFACE CONTRIBUTIONS TO THE 2-LAYER STRUCTURE IN THE PLASMA DEPOSITION OF A-SI-H [J].

SACHER, E ;

KLEMBERGSAPIEHA, J ;

WERTHEIMER, MR ;

SCHREIBER, HP ;

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PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 49 (04) :L47-L52

[4] DEPTH PROFILES OF HYDROGEN AND OXYGEN IN HYDROGENATED AMORPHOUS-SILICON THIN-FILMS [J].

SIE, SH ;

MCKENZIE, DR ;

SMITH, GB ;

RYAN, CG .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 15 (1-6) :525-529

[5]

SPROUL A, UNPUB PHIL MAG B

[6] PHOTO-LUMINESCENCE AND OPTICAL-PROPERTIES OF PLASMA-DEPOSITED AMORPHOUS SIXC1-X ALLOYS [J].

SUSSMANN, RS ;

OGDEN, R .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 44 (01) :137-158

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