HUMIDITY-SENSING AND GAS-SENSING PROPERTIES WITH AN FE2O3 FILM SPUTTERED ON A POROUS AL2O3 FILM

被引：26
作者：
FUKAZAWA, M
MATUZAKI, H
HARA, K
机构：
[1] Department of Electrical Engineering, School of Engineering, Tokyo Denki University, Chiyodaku, Tokyo, 101
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 1993年 / 14卷 / 1-3期
关键词：
D O I：
10.1016/0925-4005(93)85074-K
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
[No abstract available]
引用
收藏
页码：521 / 522
页数：2
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