X-RAY-DIFFRACTION STUDIES OF THIN-FILMS AND MULTILAYER STRUCTURES

被引：65

作者：

SEGMULLER, A ^{[1
]}

NOYAN, IC ^{[1
]}

SPERIOSU, VS ^{[1
]}

机构：

[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95120

来源：

PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS | 1989年 / 18卷

关键词：

D O I：

10.1016/0146-3535(89)90024-5

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

收藏

页码：21 / 66

页数：46

相关论文

共 82 条

[1] Barrett C. S., 1966, STRUCTURE METALS
[2] X-RAY DOUBLE-CRYSTAL DIFFRACTOMETRY OF GA1-XALXAS EPITAXIAL LAYERS
BARTELS, WJ
NIJMAN, W
[J]. JOURNAL OF CRYSTAL GROWTH, 1978, 44 (05) : 518 - 525
[3] CHARACTERIZATION OF THIN-LAYERS ON PERFECT CRYSTALS WITH A MULTIPURPOSE HIGH-RESOLUTION X-RAY DIFFRACTOMETER
BARTELS, WJ
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1983, 1 (02): : 338 - 345
[4] X-RAY-DIFFRACTION OF MULTILAYERS AND SUPERLATTICES
BARTELS, WJ
HORNSTRA, J
LOBEEK, DJW
[J]. ACTA CRYSTALLOGRAPHICA SECTION A, 1986, 42 : 539 - 545
[5] BARTELS WJ, 1987, THIN FILM GROWTH TEC, P441
[6] SENSITIVITY OF X-RAY-DIFFRACTOMETRY FOR STRAIN DEPTH PROFILING IN III-V HETEROSTRUCTURES
BENSOUSSAN, S
MALGRANGE, C
SAUVAGESIMKIN, M
[J]. JOURNAL OF APPLIED CRYSTALLOGRAPHY, 1987, 20 : 222 - 229
[7] BONSE U, 1967, SMALL ANGLE XRAY SCA, P121
[8] CALCULATED ELASTIC-CONSTANTS FOR STRESS PROBLEMS ASSOCIATED WITH SEMICONDUCTOR DEVICES
BRANTLEY, WA
[J]. JOURNAL OF APPLIED PHYSICS, 1973, 44 (01) : 534 - 535
[9] THE MICROSTRUCTURE OF HIGH - CRITICAL CURRENT SUPERCONDUCTING FILMS
CHAUDHARI, P
LEGOUES, FK
SEGMULLER, A
[J]. SCIENCE, 1987, 238 (4825) : 342 - 344
[10] Chopra K.L, 1969, THIN FILM PHENOMENA

← 1 2 3 4 5 6 7 8 9 →