NANOLITHOGRAPHY BY HIGH-ENERGY ELECTRON-BEAM

被引：0

作者：

CAMON, H

MARTINEZ, JP

BALLADORE, JL

机构：

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1988年 / 23卷 / 07期

关键词：

D O I：

10.1051/rphysap:019880023070131700

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1317 / 1323

页数：7

共 9 条

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[9] MONTE-CARLO CALCULATIONS ON ELECTRON MULTIPLE-SCATTERING IN AMORPHOUS OR POLYCRYSTALLINE TARGETS [J].

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