INTRINSIC STRESS IN AIN PREPARED BY DUAL-ION-BEAM SPUTTERING

被引：54
作者：
WINDISCHMANN, H
机构：
来源：
THIN SOLID FILMS | 1987年 / 154卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(87)90361-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：159 / 170
页数：12
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