APPLICATION OF CORRELATED SIMS AND RBS TECHNIQUES TO MEASUREMENT OF ION-IMPLANTED RANGE PROFILES

被引：9

作者：

FULLER, D ^{[1
]}

COLLIGON, JS ^{[1
]}

WILLIAMS, JS ^{[1
]}

机构：

[1] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,ENGLAND

来源：

SURFACE SCIENCE | 1976年 / 54卷 / 03期

关键词：

D O I：

10.1016/0039-6028(76)90211-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：647 / 658

页数：12

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