APPLICATION OF CORRELATED SIMS AND RBS TECHNIQUES TO MEASUREMENT OF ION-IMPLANTED RANGE PROFILES

被引：9
作者：
FULLER, D [1 ]
COLLIGON, JS [1 ]
WILLIAMS, JS [1 ]
机构：
[1] UNIV SALFORD,DEPT ELECT ENGN,SALFORD M5 4WT,ENGLAND
来源：
SURFACE SCIENCE | 1976年 / 54卷 / 03期
关键词：
D O I：
10.1016/0039-6028(76)90211-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：647 / 658
页数：12
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