LOW-TEMPERATURE ANNEALING IN AL-SIO2-SI SYSTEM

被引:0
|
作者
BALK, P
机构
关键词
D O I
暂无
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:C185 / &
相关论文
共 50 条
  • [1] INTERACTION OF LOW-TEMPERATURE H, O AND CL PLASMA BEAMS, WITH SURFACES OF SI AND AL-SIO2-SI
    MESHCHERYAKOV, NA
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1981, (11): : 106 - 108
  • [2] RADIATION-INDUCED CHANGES IN LOW-TEMPERATURE OXIDE MOS STRUCTURES (AL-SIO2-SI)
    LITOVCHENKO, VG
    KIBLICK, VY
    GEORGIEV, SS
    KIROV, KI
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 62 (1-2): : 1 - 5
  • [3] FLASH LAMP ANNEALING AND RF PLASMA ANNEALING OF AL-SIO2-SI STRUCTURES
    NAZAROV, AN
    LYSENKO, VS
    VALIEV, SA
    LOKSHIN, MM
    TKACHENKO, AS
    KUNITSKII, IA
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 120 (02): : 447 - 456
  • [4] LOW-TEMPERATURE ANNEALING OF AL-IMPLANTED SI-SIO2 STRUCTURES
    ABERG, AT
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1977, 42 (02): : 639 - 645
  • [5] SILICON WORK FUNCTION IN AL-SIO2-SI SYSTEM
    PATER, K
    SURFACE SCIENCE, 1988, 200 (2-3) : 187 - 191
  • [6] MANIFESTATION OF HYDROGEN IN AL-SIO2-SI STRUCTURES SUBJECTED TO A RF PLASMA ANNEALING
    LYSENKO, VS
    NAZAROV, AN
    NAUMOVETS, GA
    POPOV, VB
    TKACHENKO, AS
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1989, 112 (01): : K9 - K12
  • [7] EFFECT OF LOW TEMPERATURE ANNEALING ON SURFACE CONDUCTIVITY OF SI IN SI-SIO2-AL SYSTEM
    CHEROFF, G
    FANG, F
    HOCHBERG, F
    IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1964, 8 (04) : 416 - &
  • [8] SURFACE CHARGE AFTER ANNEALING OF AL-SIO2-SI STRUCTURES UNDER BIAS
    GOETZBERGER, A
    NIGH, HE
    PROCEEDINGS OF THE INSTITUTE OF ELECTRICAL AND ELECTRONICS ENGINEERS, 1966, 54 (10): : 1454 - +
  • [9] TEMPERATURE-DEPENDENCE OF TRANSIENT CAPACITANCE OF AL-SIO2-SI CAPACITORS
    BHARAT, R
    FITZGIBBONS, ET
    LAPRADE, JE
    APPLIED PHYSICS LETTERS, 1979, 34 (02) : 170 - 172
  • [10] KINETIC-BEHAVIOR OF MOBILE IONS IN THE AL-SIO2-SI SYSTEM
    BOUDRY, MR
    STAGG, JP
    JOURNAL OF APPLIED PHYSICS, 1979, 50 (02) : 942 - 950