AN INTEGRATED CAPACITIVE PRESSURE SENSOR WITH FREQUENCY-MODULATED OUTPUT

被引：26
作者：
HANNEBORG, A
HANSEN, TE
OHLCKERS, PA
CARLSON, E
DAHL, B
HOLWECH, O
机构：
来源：
SENSORS AND ACTUATORS | 1986年 / 9卷 / 04期
关键词：
D O I：
10.1016/0250-6874(86)80066-X
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：345 / 351
页数：7
相关论文
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[2]   A HIGH-SENSITIVITY INTEGRATED-CIRCUIT CAPACITIVE PRESSURE TRANSDUCER [J].
KO, WH ;
BAO, MH ;
HONG, YD .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1982, 29 (01) :48-56
[3]   A PIEZORESISTIVE INTEGRATED PRESSURE SENSOR [J].
YAMADA, K ;
NISHIHARA, M ;
KANZAWA, R ;
KOBAYASHI, R .
SENSORS AND ACTUATORS, 1983, 4 (01) :63-69
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