TEMPERATURE-INDEPENDENT PRESSURE SENSORS USING POLYCRYSTALLINE SILICON STRAIN-GAUGES

被引：22

作者：

SCHAFER, H ^{[1
]}

GRAEGER, V ^{[1
]}

KOBS, R ^{[1
]}

机构：

[1] PHILIPS GMBH,FORSCHUNGSLABOR HAMBURG,D-2000 HAMBURG 54,FED REP GER

来源：

SENSORS AND ACTUATORS | 1989年 / 17卷 / 3-4期

关键词：

D O I：

10.1016/0250-6874(89)80040-X

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：521 / 527

页数：7

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