TEMPERATURE-INDEPENDENT PRESSURE SENSORS USING POLYCRYSTALLINE SILICON STRAIN-GAUGES

被引：22
|
作者：
SCHAFER, H [1 ]
GRAEGER, V [1 ]
KOBS, R [1 ]
机构：
[1] PHILIPS GMBH,FORSCHUNGSLABOR HAMBURG,D-2000 HAMBURG 54,FED REP GER
来源：
SENSORS AND ACTUATORS | 1989年 / 17卷 / 3-4期
关键词：
D O I：
10.1016/0250-6874(89)80040-X
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
引用
收藏
页码：521 / 527
页数：7
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