MODEL FOR BORON-DIFFUSION IN SI AT HIGH-CONCENTRATIONS

被引：2
作者：
HOLLAND, OW [1 ]
NARAYAN, J [1 ]
机构：
[1] N CAROLINA STATE UNIV,DEPT MAT SCI & ENGN,RALEIGH,NC 27695
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 40-1卷
关键词：
D O I：
10.1016/0168-583X(89)91040-9
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：537 / 542
页数：6
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