PHOTOMETRIC ELLIPSOMETER FOR MEASURING FLUX IN A GENERAL STATE OF POLARIZATION

被引：15

作者：

ASPNES, DE ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1016/0039-6028(76)90443-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：161 / 169

页数：9

共 11 条

[1]

Aspnes D. E., 1973, Optics Communications, V8, P222, DOI 10.1016/0030-4018(73)90132-6

[2]

Aspnes D. E., 1976, OPTICAL PROPERTIES S, P799

[3] MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY [J].

ASPNES, DE .

[4] HIGH PRECISION SCANNING ELLIPSOMETER [J].

ASPNES, DE ;

STUDNA, AA .

APPLIED OPTICS, 1975, 14 (01) :220-228

[5] PHOTOMETRIC ELLIPSOMETER FOR MEASURING PARTIALLY POLARIZED-LIGHT [J].

ASPNES, DE .

[6]

BORN M, 1975, PRINCIPLES OPTICS, P554

[7]

BORN M, 1975, PRINCIPLES OPTICS, P544

[8]

Clark D. E., 1971, Proceedings of 20th international wire and cable symposium, P118

[9] PRESENT STATUS OF AUTOMATIC ELLIPSOMETERS [J].

MULLER, RH .

[10] DEFINITIONS AND CONVENTIONS IN ELLIPSOMETRY [J].

MULLER, RH .