BEAM-DIAMETER CORRECTION OF X-RAY INTENSITY PROFILE OVER SMALL DIFFUSION ZONES

被引:12
作者
LO, CC [1 ]
SCHUELE, DE [1 ]
机构
[1] BELL TEL LABS INC,COLUMBUS,OH 43213
关键词
D O I
10.1063/1.321473
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:5004 / 5009
页数:6
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