QUANTITATIVE DETECTION OF OXYGEN IN SILICON-NITRIDE ON SILICON

被引：53

作者：

HOLLOWAY, PH ^{[1
]}

STEIN, HJ ^{[1
]}

机构：

[1] SANDIA LABS,ALBUQUERQUE,NM 87115

来源：

关键词：

D O I：

10.1149/1.2132916

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：723 / 728

页数：6

共 50 条

[21] APPLICATIONS OF SILICON-NITRIDE
POPPER, P
SILICON NITRIDE 93, 1994, 89-9 : 719 - 723
[22] DISSOCIATION OF SILICON-NITRIDE
ANDRIEVSKII, RA
KHROMOV, YF
LYUTIKOV, RA
ZHMUROV, SA
GALKIN, EA
YURKOVA, RS
ZHURNAL FIZICHESKOI KHIMII, 1994, 68 (01): : 5 - 8
[23] SINTERING OF SILICON-NITRIDE
不详
ENGINEERING MATERIALS AND DESIGN, 1979, 23 (09): : 65 - 66
[24] SINTERING OF SILICON-NITRIDE
LOEHMAN, RE
ROWCLIFFE, DJ
AMERICAN CERAMIC SOCIETY BULLETIN, 1980, 59 (08): : 826 - 827
[25] ON SILICON-NITRIDE CONDUCTIVITY
GRITSENKO, VA
MEERSON, EE
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 62 (02): : K131 - K134
[26] SILICON-NITRIDE CERAMIC
TOMILTSEV, EA
KOZLOVSKII, LV
GRABEZHEV, DV
SHENDRIK, AV
JOURNAL OF APPLIED CHEMISTRY OF THE USSR, 1992, 65 (05): : 965 - 966
[27] SILICON-NITRIDE CERAMICS
LICKO, T
LENCES, Z
CERAMICS-SILIKATY, 1994, 38 (02) : 105 - 111
[28] OXIDATION OF SILICON-NITRIDE
MUKERJI, J
NANDI, AK
DHARGUPTA, KK
CENTRAL GLASS AND CERAMIC RESEARCH INSTITUTE BULLETIN, 1978, 25 (03): : 55 - 59
[29] SILICON-NITRIDE JOINING
MECARTNEY, ML
SINCLAIR, R
LOEHMAN, RE
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1985, 68 (09) : 472 - 478
[30] JOINING OF SILICON-NITRIDE TO SILICON-NITRIDE AND TO INVAR ALLOY USING AN ALUMINUM INTERLAYER
SUGANUMA, K
OKAMOTO, T
KOIZUMI, M
SHIMADA, M
JOURNAL OF MATERIALS SCIENCE, 1987, 22 (04) : 1359 - 1364