QUANTITATIVE DETECTION OF OXYGEN IN SILICON-NITRIDE ON SILICON

被引：53
|
作者：
HOLLOWAY, PH [1 ]
STEIN, HJ [1 ]
机构：
[1] SANDIA LABS,ALBUQUERQUE,NM 87115
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1976年 / 123卷 / 05期
关键词：
D O I：
10.1149/1.2132916
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：723 / 728
页数：6
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