SOLID-PHASE EPITAXIAL-GROWTH OF SI THROUGH PALLADIUM SILICIDE LAYERS

被引：36

作者：

CANALI, C ^{[1
]}

CAMPISANO, SU ^{[1
]}

LAU, SS ^{[1
]}

LIAU, ZL ^{[1
]}

MAYER, JW ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91125

来源：

JOURNAL OF APPLIED PHYSICS | 1975年 / 46卷 / 07期

关键词：

D O I：

10.1063/1.322026

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2831 / 2836

页数：6

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