CHEMISTRY OF SPUTTERED MOLYBDENUM-DISULFIDE FILMS

被引：97

作者：

STEWART, TB ^{[1
]}

FLEISCHAUER, PD ^{[1
]}

机构：

[1] AEROSPACE CORP,CHEM & PHYS LAB,EL SEGUNDO,CA 90245

来源：

INORGANIC CHEMISTRY | 1982年 / 21卷 / 06期

关键词：

D O I：

10.1021/ic00136a060

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

引用

页码：2426 / 2431

页数：6

共 14 条

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[5] STICKING PROBABILITIES REDISTRIBUTION PHENOMENA AND DESORPTION SPECTRA FOR NITROGEN ON MOLYBDENUM AND TITANIUM FILMS [J].

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JAPANESE JOURNAL OF APPLIED PHYSICS, 1981, 20 (07) :1225-1233

[7]

NISHIMURA M, 1978, 2ND P INT C SOL LUBR, P128

[8] SURFACE OXIDATION OF MOLYBDENUM DISULFIDE [J].

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[9]

Salomon G., 1964, WEAR, V7, P87, DOI DOI 10.1016/0043-1648(64)90081-X

[10]

Seah M. P., 1979, Surface and Interface Analysis, V1, P2, DOI 10.1002/sia.740010103

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