A NEW TECHNIQUE FOR CHARACTERIZING LOW-DEFECT SIMOX

被引：3
|
作者：
FECHNER, PS
GARDNER, GR
LIU, ST
机构：
[1] Honeywell Solid State Electronics Center, Plymouth, MN 55441
来源：
MATERIALS LETTERS | 1990年 / 9卷 / 12期
关键词：
D O I：
10.1016/0167-577X(90)90097-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Defect density in thin top silicon layer of SIMOX materials was investigated. TEM characterization of low-defect (< 106 cm-2) SIMOX was both cost and time prohibitive to inspect large areas. A new technique using a diluted Secco etch followed by a hydrofluoric acid decoration was developed to identify unambiguously such defects. The technique utilizes the same etchant and equipment used for defect characterization of single-crystalline silicon wafers and is found useful in SOI device development. © 1990.
引用
收藏
页码：508 / 510
页数：3
相关论文
共 50 条
  • [41] Control of the Synthesis and Composition of Semiconductors. Low-Defect Silicon Carbide and Low-Dimensional Cadmium Selenide
    Zlomanov, V. P.
    PHYSICS OF THE SOLID STATE, 2020, 62 (01) : 8 - 12
  • [42] Low-Defect Thiol-Michael Addition Hydrogels as Matrigel Substitutes for Epithelial Organoid Derivation
    Rezakhani, Saba
    Gjorevski, Nikolce
    Lutolf, Matthias P.
    ADVANCED FUNCTIONAL MATERIALS, 2020, 30 (48)
  • [43] Injection-level-dependent internal quantum efficiency and lasing in low-defect GaN nanowires
    Schlager, John B.
    Sanford, Norman A.
    Bertness, Kris A.
    Roshko, Alexana
    JOURNAL OF APPLIED PHYSICS, 2011, 109 (04)
  • [44] Spectral-luminescent properties of low-defect organic glasses doped with europium tris(benzoyltrifluoroacetonate)
    V. V. Semenov
    N. V. Zolotareva
    L. G. Klapshina
    O. N. Gorshkov
    A. P. Kasatkin
    I. N. Antonov
    A. N. Mikhailov
    K. V. Sidorenko
    V. M. Treushnikov
    V. V. Treushnikov
    G. A. Domrachev
    Doklady Physical Chemistry, 2008, 420 : 148 - 153
  • [45] Optical Properties of Low-Defect Large-Area Hexagonal Boron Nitride for Quantum Applications
    Sankar, Shrivatch
    Saha, Shantanu
    Chen, Jia-Shiang
    Chien, Shih-Po
    Lan, Yann--Wen
    Ma, Xuedan
    Snure, Michael
    Arafin, Shamsul
    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2024, 18 (06):
  • [46] Spectral-luminescent properties of low-defect organic glasses doped with europium tris(benzoyltrifluoroacetonate)
    Semenov, V. V.
    Zolotareva, N. V.
    Klapshina, L. G.
    Gorshkov, O. N.
    Kasatkin, A. P.
    Antonov, I. N.
    Mikhailov, A. N.
    Sidorenko, K. V.
    Treushnikov, V. M.
    Treushnikov, V. V.
    Domrachev, G. A.
    DOKLADY PHYSICAL CHEMISTRY, 2008, 420 (2) : 148 - 153
  • [47] Balanced coordination enables low-defect Prussian blue for superfast and ultrastable sodium energy storage
    Jiang, Mingwei
    Hou, Zhidong
    Wang, Jinjin
    Ren, Lingbo
    Zhang, Yu
    Wang, Jian-Gan
    NANO ENERGY, 2022, 102
  • [48] Growth of Smooth, Low-Defect Germanium Layers on (111) Silicon via an Intermediate Islanding Process
    Dobbie, Andy
    Van Huy Nguyen
    Myronov, Maksym
    Whall, Terry E.
    Parker, Evan H. C.
    Leadley, David R.
    APPLIED PHYSICS EXPRESS, 2012, 5 (07)
  • [49] Effect of implantation energy on the defect formation in SIMOX
    Bagchi, S
    Lee, JD
    Krause, SJ
    Roitman, P
    1996 IEEE INTERNATIONAL SOI CONFERENCE PROCEEDINGS, 1996, : 40 - 41
  • [50] Mesosynthesis of ZnO-SiO2 porous nanocomposites with low-defect ZnO nanometric domains
    Fernandez, Lorenzo
    Garro, Nuria
    El Haskouri, Jamal
    Perez-Cabero, Monica
    Alvarez-Rodriguez, Jesus
    Latorre, Julio
    Guillem, Carmen
    Beltran, Aurelio
    Beltran, Daniel
    Amoros, Pedro
    NANOTECHNOLOGY, 2008, 19 (22)
12345