ELECTRON-BEAM INDUCED CHANGES IN ELECTRICAL CHARACTERISTICS OF METAL GAAS SCHOTTKY CONTACTS

被引：0
作者：
GAZECKI, J
TAY, M
WILLIAMS, JS
SENGUPTA, D
机构：
来源：
APPLIED SURFACE SCIENCE | 1989年 / 37卷 / 02期
关键词：
D O I：
10.1016/0169-4332(89)90481-9
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：180 / 188
页数：9
相关论文
共 50 条
[21]   RAPID ELECTRON-BEAM AND OPTICAL FURNACE ALLOYING OF AUGE/NI CONTACTS TO GAAS [J].
NASSIBIAN, AG ;
WOOD, CEC ;
FROST, MS ;
HASKO, DG ;
AHMED, H ;
MORGAN, DV .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1991, 125 (01) :255-262
[22]   ELECTRON-BEAM PENETRATION IN GAAS [J].
MARTINELLI, RU ;
WANG, CC .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (07) :3350-3351
[23]   ELECTRON-BEAM TECHNOLOGY IN SWITCH CONTACTS [J].
RUSSELL, RJ ;
KHUNTIA, PC .
IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1979, 2 (01) :61-65
[24]   ELECTRICAL-PROPERTIES OF IDEAL METAL CONTACTS TO GAAS - SCHOTTKY-BARRIER HEIGHT [J].
WALDROP, JR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1984, 2 (03) :445-448
[25]   INVESTIGATION OF OHMIC AND SCHOTTKY CONTACTS ON N-GAAS USING SPIN-ON GLASS CAPPING LAYERS AND SCANNED ELECTRON-BEAM ALLOYING [J].
PRASAD, K ;
FARAONE, L ;
NASSIBIAN, AG .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 1989, 4 (06) :458-464
[26]   SCHOTTKY-BARRIER HEIGHT MEASUREMENT BY ELECTRON-BEAM INDUCED VOLTAGE [J].
HUANG, HCW ;
ALIOTTA, CF ;
HO, PS .
APPLIED PHYSICS LETTERS, 1982, 41 (01) :54-56
[27]   DRILLING CHARACTERISTICS OF METAL FOIL IN ELECTRON-BEAM PROCESSING [J].
MIYAZAKI, T .
BULLETIN OF THE JAPAN SOCIETY OF PRECISION ENGINEERING, 1979, 13 (04) :207-212
[28]   ELECTROCHEMICALLY DEPOSITED COPPER SCHOTTKY CONTACTS ON N-TYPE GAAS FOR ELECTRON-BEAM-INDUCED CURRENT MEASUREMENTS [J].
SCHLESINGER, R ;
ROGASCHEWSKI, S ;
JANIETZ, PJ .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1990, 120 (02) :687-694
[29]   ELECTRON-BEAM INDUCED REACTIONS IN METAL SI SYSTEMS [J].
MAJNI, G ;
NAVA, F ;
OTTAVIANI, G ;
LUCHES, A ;
NASSISI, V ;
CELOTTI, G .
VACUUM, 1982, 32 (01) :11-18
[30]   EFFECTS OF INTERFACE REACTIONS ON ELECTRICAL CHARACTERISTICS OF METAL-GAAS CONTACTS [J].
YU, KM ;
WALUKIEWICZ, W ;
JAKLEVIC, JM ;
HALLER, EE .
APPLIED PHYSICS LETTERS, 1987, 51 (03) :189-191
12345