A STUDY OF NITROGEN-RICH TITANIUM AND ZIRCONIUM NITRIDE FILMS

被引：43
|
作者：
RISTOLAINEN, EO
MOLARIUS, JM
KORHONEN, AS
LINDROOS, VK
机构：
[1] HELSINKI UNIV TECHNOL,PHYS MET LAB,SF-02150 ESPOO 15,FINLAND
[2] HELSINKI UNIV TECHNOL,MET WORKING & HEAT TREATMENT LAB,SF-02150 ESPOO 15,FINLAND
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词：
D O I：
10.1116/1.574950
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：2184 / 2189
页数：6
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