DETERMINATION OF THE ATOMIC-STRUCTURE OF THE EPITAXIAL COSI2-SI(111) INTERFACE USING HIGH-RESOLUTION RUTHERFORD BACKSCATTERING

被引：36
作者：
FISCHER, AEMJ
GUSTAFSSON, T
VANDERVEEN, JF
机构：
来源：
PHYSICAL REVIEW B | 1988年 / 37卷 / 11期
关键词：
D O I：
10.1103/PhysRevB.37.6305
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：6305 / 6310
页数：6
相关论文
共 26 条
[1]  
Andersen H., 1977, STOPPING RANGES IONS
[2]   MONTE CARLO CHANNELING CALCULATIONS [J].
BARRETT, JH .
PHYSICAL REVIEW B, 1971, 3 (05) :1527-&
[3]  
CHERNS D, 1982, PHILOS MAG A, V46, P827
[4]   STRUCTURAL-ANALYSIS OF AN SI/COSI2/SI HETEROSTRUCTURE USING ULTRAHIGH RESOLUTION TRANSMISSION ELECTRON-MICROSCOPY [J].
DANTERROCHES, C ;
DAVITAYA, FA .
THIN SOLID FILMS, 1986, 137 (02) :351-361
[5]  
FELDMAN LC, 1982, MATERIALS ANAL ION C
[6]   STRUCTURE DETERMINATION OF THE COSI2-SI(111) INTERFACE BY X-RAY STANDING-WAVE ANALYSIS [J].
FISCHER, AEMJ ;
VLIEG, E ;
VANDERVEEN, JF ;
CLAUSNITZER, M ;
MATERLIK, G .
PHYSICAL REVIEW B, 1987, 36 (09) :4769-4773
[7]  
FISCHER AM, UNPUB
[8]   THEORY AND SIMULATION OF HIGH-ENERGY ION-SCATTERING EXPERIMENTS FOR STRUCTURE-ANALYSIS OF SURFACES AND INTERFACES [J].
FRENKEN, JWM ;
TROMP, RM ;
VANDERVEEN, JF .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1986, 17 (04) :334-343
[9]  
Gibson J. M., 1983, MATER RES SOC S P, V14, P395
[10]  
GIBSON JM, 1982, APPL PHYS LETT, V41, P818, DOI 10.1063/1.93699
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