THIN ORGANIC FILMS PRODUCED BY ION-IMPLANTATION

被引：9

作者：

CALCAGNO, L

SHENG, KL

TORRISI, L

FOTI, G

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 08期

关键词：

D O I：

10.1063/1.94908

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：761 / 763

页数：3

共 8 条

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[2]

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[3] ION-BEAM LITHOGRAPHY [J].

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VENKATESAN, T ;

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[4] LARGE CONDUCTIVITY CHANGES IN ION-BEAM IRRADIATED ORGANIC THIN-FILMS [J].

FORREST, SR ;

KAPLAN, ML ;

SCHMIDT, PH ;

VENKATESAN, T ;

LOVINGER, AJ .

APPLIED PHYSICS LETTERS, 1982, 41 (08) :708-710

[5] CHEMICAL EFFECTS INDUCED BY ION-IMPLANTATION IN MOLECULAR-SOLIDS [J].

FOTI, G ;

CALCAGNO, L ;

PUGLISI, O .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 209 (MAY) :87-96

[6]

KRUTZ R, 1980, PHYS REV A, V22, P6

[7]

MAYER JW, 1977, ION BEAM HDB MATERIA

[8]

VENKATESAN T, 1983, J APPL PHYS, V54, P6

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