THE INFLUENCE OF ELECTRODE GEOMETRY ON LIQUID-METAL ION-SOURCE PERFORMANCE

被引：6
|
作者：
SWANSON, LW
LI, JZ
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 04期
关键词：
D O I：
10.1116/1.584298
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1062 / 1065
页数：4
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