RBS study of defect profiles in proton implanted LiNbO3

被引：2
|
作者：
Salem, SO
Canut, B
Moretti, P
Meddeb, J
Ramos, SMM
Thevenard, P
机构：
[1] Département de Physique des Matériaux (U.RA. C.N.R.S. 172), Université Claude Bernard Lyon I
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1995年 / 136卷 / 1-4期
关键词：
niobate lithium; implantation; defects;
D O I：
10.1080/10420159508218801
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
Single crystals of lithium niobate were implanted at room temperature with 20 keV protons at fluences ranging from 5 x 10(16) H+/cm(2) to 2 x 10(17) H+/cm(2). Rutherford Backscattering Spectrometry in channeling geometry (RBS-C) performed at three beam energies (1, 1.5, and 2 MeV) and subsequent analysis of the energy dependence of the dechanneling cross section enabled us to show the predominant induced lattice defects are likely of a 'point' nature. Electron microscopy investigations also support this assumption.
引用
收藏
页码：103 / 106
页数：4
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