TRANSPARENT CONDUCTING P-TYPE NIO THIN-FILMS PREPARED BY MAGNETRON SPUTTERING

被引:865
作者
SATO, H
MINAMI, T
TAKATA, S
YAMADA, T
机构
[1] Electron Device System Laboratory, Kanazawa Institute of Technology, Nonoichi, Ishikawa, 921
关键词
D O I
10.1016/0040-6090(93)90636-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Transparent and conductive thin films consisting of p-type nickel oxide (NiO) semiconductors were prepared by r.f. magnetron sputtering. A resistivity of 1.4 x 10(-1) Ohm cm and a hole concentration of 1.3 x 10(19) cm(-3) were obtained for non-intentionally doped NiO films prepared at a substrate temperature of 200 degrees C in a pure oxygen sputtering gas. An average transmittance of about 40% in the visible range was obtained for a 110 nm thick NiO film. A semitransparent thin film pin diode consisting of p-NiO/i-NiO/i-ZnO/n-ZnO layers having a voltage-current rectification characteristic and an average transmittance above 20% in the visible range was fabricated on a glass substrate.
引用
收藏
页码:27 / 31
页数:5
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