A STUDY OF THE MACROPARTICLE DISTRIBUTION IN CATHODIC-ARC-EVAPORATED TIN FILMS

被引：61
|
作者：
BAOUCHI, AW
PERRY, AJ
机构：
[1] Vac-Tec Systems Inc., Boulder, CO 80301
来源：
SURFACE & COATINGS TECHNOLOGY | 1991年 / 49卷 / 1-3期
关键词：
D O I：
10.1016/0257-8972(91)90064-4
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The quantity, size distribution and shape of macroparticles emitted during the arc evaporation of TiN films were studied in the range of arc currents between 45 and 120 A. The quantity of macroparticles is independent of the operating background pressure and the combination of the flow of nitrogen gas and the arc current. However, the size and shape are dependent on these last two variables. It is demonstrated that the macroparticles are emitted preferentially at an angle of 60 to the plane of the target. The frequency of the mechanical striking of the arc target does not influence the total volume of macroparticles ejected towards the growing film.
引用
收藏
页码：253 / 257
页数：5
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