TRIBOLOGICAL PROPERTIES OF DIAMOND FILMS GROWN BY PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION

被引：46
作者：
WONG, MS
MEILUNAS, R
ONG, TP
CHANG, RPH
机构：
来源：
APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 20期
关键词：
D O I：
10.1063/1.101197
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：2006 / 2008
页数：3
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