TRIBOLOGICAL PROPERTIES OF DIAMOND FILMS GROWN BY PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION

被引：46

作者：

WONG, MS

MEILUNAS, R

ONG, TP

CHANG, RPH

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 20期

关键词：

D O I：

10.1063/1.101197

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2006 / 2008

页数：3

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