THE FABRICATION OF AN ELECTROSTATIC LINEAR-ACTUATOR BY SILICON MICROMACHINING

被引：21

作者：

FUJITA, H

OMODAKA, A

机构：

来源：

关键词：

D O I：

10.1109/16.2524

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：731 / 734

页数：4

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