THE FABRICATION OF AN ELECTROSTATIC LINEAR-ACTUATOR BY SILICON MICROMACHINING

被引:21
作者
FUJITA, H
OMODAKA, A
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D O I
10.1109/16.2524
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TM [电工技术]; TN [电子技术、通信技术];
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0808 ; 0809 ;
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页码:731 / 734
页数:4
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