MOS STRUCTURES WITH CHLORINE GROWN OXIDE AND TUNGSTEN-GOLD METALLIZATION

被引：0

作者：

ILIEVA, M ^{[1
]}

KAMENOVA, M ^{[1
]}

POPOVA, A ^{[1
]}

机构：

[1] INST MICROELECTR,BUL LENIN 7TH KILOMETER,1113 SOFIA,BULGARIA

来源：

THIN SOLID FILMS | 1975年 / 30卷 / 02期

关键词：

D O I：

10.1016/0040-6090(75)90092-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：281 / 285

页数：5

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