INTERNAL-STRESS IN GROWING TIO2 FILMS

被引:8
作者
PANAGOPOULOS, CN
机构
来源
JOURNAL OF THE LESS-COMMON METALS | 1988年 / 141卷 / 02期
关键词
D O I
10.1016/0022-5088(88)90419-5
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:335 / 343
页数:9
相关论文
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