NEW TYPES OF PERIODIC STRUCTURES IN LASER-INDUCED CHEMICAL VAPOR-DEPOSITION

被引:17
作者
DU, YC [1 ]
KEMPFER, U [1 ]
PIGLMAYER, K [1 ]
BAUERLE, D [1 ]
TITULAER, UM [1 ]
机构
[1] JOHANNES KEPLER UNIV,THEORET PHYS,A-4040 LINZ,AUSTRIA
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1986年 / 39卷 / 03期
关键词
D O I
10.1007/BF00620731
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:167 / 171
页数:5
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