PREPARATION OF SP3-RICH AMORPHOUS-CARBON FILM BY HYDROGEN GAS REACTIVE RF-SPUTTERING OF GRAPHITE, AND ITS PROPERTIES

被引：52

作者：

MIYASATO, T ^{[1
]}

KAWAKAMI, Y ^{[1
]}

KAWANO, T ^{[1
]}

HIRAKI, A ^{[1
]}

机构：

[1] OSAKA UNIV,DEPT ELECT ENGN,SUITA,OSAKA 565,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1984年 / 23卷 / 04期

关键词：

D O I：

10.1143/JJAP.23.L234

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：L234 / L237

页数：4

共 10 条

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