ION RESIST PROPERTIES OF THIN-FILMS OF TRANSITION-METAL OXIDES

被引：7

作者：

KOSHIDA, N

ICHINOSE, Y

OHTAKA, K

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 39卷 / 1-4期

关键词：

D O I：

10.1016/0168-583X(89)90886-0

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：736 / 738

页数：3

共 8 条

[1] ION-BEAM EXPOSURE CHARACTERISTICS OF RESISTS - EXPERIMENTAL RESULTS [J].

HALL, TM ;

WAGNER, A ;

THOMPSON, LF .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) :3997-4010

[2] OBSERVATION OF AN INSULATOR-METAL TRANSITION WITH NA+-IRRADIATED AMORPHOUS MOO3 FILMS [J].

KOSHIDA, N ;

IKETSU, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (09) :1596-1597

[3] ION-BEAM MODIFICATION OF AMORPHOUS WO3 FILM AND ITS PROPERTIES AS A HIGH-CONTRAST INORGANIC-ION RESIST [J].

KOSHIDA, N ;

TOMITA, O .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (01) :92-94

[4] MECHANISM OF A HIGH-CONTRAST INORGANIC-ION RESIST USING AMORPHOUS WO3 [J].

KOSHIDA, N ;

TOMITA, O .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1986, 25 (12) :1932-1935

[5]

KOSHIDA N, 1985, 17TH C SOL STAT DEV, P369

[6] RADIATION-DAMAGE IN CRYSTALLINE INSULATORS, OXIDES AND CERAMIC NUCLEAR-FUELS [J].

MATZKE, H .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1982, 64 (1-4) :3-33

[7] CRITERIA FOR BOMBARDMENT-INDUCED STRUCTURAL-CHANGES IN NON-METALLIC SOLIDS [J].

NAGUIB, HM ;

KELLY, R .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1975, 25 (01) :1-12

[8]

Phillips J.C., 1973, BONDS BANDS SEMICOND

← 1 →