ANALYSIS OF CHEMICAL VAPOR-DEPOSITION OF TITANIUM DIBORIDE .2. MODELING KINETICS OF DEPOSITION

被引：31

作者：

BESMANN, TM ^{[1
]}

SPEAR, KE ^{[1
]}

机构：

[1] PENN STATE UNIV,MAT RES LAB,UNIVERSITY PK,PA 16802

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1977年 / 124卷 / 05期

关键词：

D O I：

10.1149/1.2133408

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：790 / 797

页数：8

共 12 条

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[3] ANALYSIS OF CHEMICAL VAPOR-DEPOSITION OF TITANIUM DIBORIDE .1. EQUILIBRIUM THERMODYNAMIC ANALYSIS [J].

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SPEAR, KE .

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[6] VAPOR-DEPOSITED BORIDES OF GROUP 4A METALS [J].

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[7]

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[8]

MEHALSO RM, 1975, CHEM VAPOR DEPOSITIO, P84

[9]

MOERS K, 1931, Z ANORG ALLG CHEM, V198, P243

[10]

PESHEV P, 1965, J LESS-COMMON MET, V10, P133

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